High speed fiber optic transceiver modules using parallel optics require that oxide-confined vertical-cavity surfaceemitting lasers (VCSELs) be moisture resistant in non-hermetic environments. Conventional storage 85/85 (85°C and 85% relative humidity) testing without a bias does not adequately characterize oxide VCSEL's moisture resistance. Oxide VCSELs do not fail or degrade significantly under such conditions. With a bias, however, we have found that moisture can cause failure modes not seen in dry reliability testing. Without proper device design and fabrication, these failure modes lead to high failure rates in oxide VCSELs. In this paper, we first discuss the failure mechanisms we have identified, including dense dislocation network growth, semiconductor cracking and aperture surface degradation, all in high humidity and high temperature under operating conditions. We then report the results of environmental reliability tests on Agilent's oxide VCSELs developed for the parallel optics modules. The results from a large number of wafers produced over an extended period of time have shown consistent, robust environmental reliability.

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Oxide VCSELs are the emitter of choice for high-speed optical communication applications. A low divergence circular beam, wafer-level testing and the capability to create dense two-dimensional arrays provide the VCSEL with unique advantages over edge emitting lasers, such that VSCELs have become a significant part of the optical communication market. An equally important metric for VCSELs is field reliability since significant failure rates are unacceptable for implementation of reliable networks.In order to better understand potential failure paths of VCSELs during field use, a variety of failures have been intentionally created on oxide VCSELs made from AlGaAs / GaAs materials operating at 850nm. Failures were created with epitaxial defects, scratches, surface contamination, thermal shock , ESD and elevated temperature and humidity (85C/85% humidity). We will present the results of these intentional failures, assess high-probability failure paths and compare and contrast the various failure mechanisms.

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