Existing methods of characterising surface topography (planarity, feature dimensions, roughness, etc.) include atomic force microscopy (AFM) and stylus profilometry. Stylus profilers can scan up to 200 mm in length to characterise global planarity, but are limited in their lateral resolution for accurately characterising micro- and submicrometre features. They can also cause damage to the surface under study by dragging the stylus with forces in excess of what the surface can tolerate without inelastic deformation occurring. The AFM is gentler on the specimen than stylus profilers and has higher lateral resolution, but is limited in its ability to image areas greater than 100 × 100 μm. Two new types of metrology tools, the atomic force profiler and the long scan AFM, have been developed, combining AFM resolution, non-destructive characterisation capability, and long profile lengths. These tools can be used for measuring surface roughness, waviness, profile, step height, and angle, as well as for imaging surface defects. The main characteristics of these tools are presented, in addition to respective measurement data from each.

KEY WORDS.X-ray microscopy, microfocal radiography, contact microradiography, projection microradiography . SUMMARY X-ray microscopy is a form of high resolution radiography that uses low-energy X-rays (a10 keV) to enhance the contrast between light elements such as hydrogen, carbon, nitrogen and oxygen. As performed on compact laboratory equipment the technique can achieve spatial resolutions of roughly 1 pm in virtually any material given that the specimen is sufficiently thin (typically 0.2-2 mm) to be adequately transparent to low-energy X-rays. Notwithstanding that the technique has lately found favour in biomedical radiology, its considerable potential in other fields, notably the materials sciences, remains largely unexploited.The scope and potential of laboratory X-ray microscopy in the materials sciences is demonstrated here by its application to ceramics, elastomers, coal-chars and reinforced composites. In all cases the technique provided valuable microstructural characterization often unobtainable by any other non-destructive method. These examples demonstrate that laboratory X-ray microscopy offers much to the materials sciences and deserves a wider application than is current.

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A generation of large area flat panel stylus profilers is being built using a new approach to positioning and moving the measurement head over the sample. This approach has several advantages to FPD Manufacturers, including reduced footprint, lower measurement noise, and superior positioning repeatability.