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Epitaxial YBa 2 Cu 3 O 7 (YBCO) films were prepared on cerium oxide-buffered (40 nm) -cut single-crystal sapphire ( Al 2 O 3 ) substrates by a novel excimer-laser-assisted metalorganic deposition (ELAMOD). Laser irradiation after application of a fluorine-free ingredient solution onto the substrates revealed to have the advantages of shorter heating (prefiring and heat-treatment) time and higher superconducting current density ( c ). The c in excess of 5 MA cm 2 was measured by an inductive method at 77.3 K. The laser irradiation is considered to produce a desirable precursor, in which three metal components are well-mixed in short time. The x-ray diffraction measurement of the irradiated area clearly showed a complete -axis oriented YBCO and no impurity phase, whereas -axis oriented YBCO was also observed in the area without irradiation. The ratio of the -axis component decreased with an increase of the laser irradiation.