By systematically comparing the magnetic properties of the Ta/CoFeB/Ta and MgO/CoFeB/MgO structures with and without a submonolayer of MgO, Ta, V, Nb, Hf and W inserted in the middle of the CoFeB layer, we have proved that the observed perpendicular magnetic anisotropy (PMA) in Ta/CoFeB/MgO sandwiches is solely originated from the CoFeB/MgO interface with the Ta buffer acting to enhance the CoFeB/MgO interface anisotropy significantly. Moreover, replacing Ta with Hf causes the CoFeB/MgO interfacial PMA further enhanced by 35%, and the CoFeB layer with perpendicular magnetization has a much larger critical thickness accordingly, leaving a wider thickness margin for the CoFeB/MgO-based perpendicular magnetic tunnel junction optimization. Also the sputter deposited thin Hf films are amorphous with low surface roughness. These results will ensure the Hf/CoFeB/MgO more promising material system for PMA device development.

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