We report perpendicular magnetic anisotropy (PMA) in the half-metallic ferromagnetic Heusler alloy Co 2 Fe 0.4 Mn 0.6 Si (CFMS) in a MgO/CFMS/Pd trilayer stack. PMA is found for CFMS thicknesses between 1 and 2 nm, with a magnetic anisotropy energy density of K U = 1.5 Ă 10 6 erg/cm 3 for t CFMS = 1.5 nm. Both the MgO and Pd layer are necessary to induce the PMA. We measure a tunable anomalous Hall effect, where its sign and magnitude vary with both the CFMS and Pd thickness.A magnetic thin film will generally prefer to have its magnetic moment lying in the plane of the sample owing to the large demagnetizing field. New magnetic devices have made it desirable to fabricate thin magnetic layers which instead have an easy axis of magnetization directed perpendicular to the film plane, a condition known as perpendicular magnetic anisotropy (PMA). 1 In particular, spin-transfer-torque (STT) based devices require that a magnetic free layer can be easily flipped by a spin-polarized current while maintaining a high stability against thermal fluctuations. 2 Magnetic layers with PMA are well suited to optimize this trade-off for device applications.In order to realize a high efficiency STT device, a high degree of spin-polarization in the magnetic layers is also desirable. CoFeB, with approximately 65% spin polarization, has been the most widely studied material so far, because it can be grown with PMA and incorporated into device structures with very large tunneling magnetoresistance (TMR). 3 There is a strong motivation to incorporate a half-metallic ferromagnet (HMFM) with higher spin polarization in these devices, and Heusler alloys are promising in this regard. 4 In particular, Co 2 FeSi and Co 2 MnSi both have 100% spin polarization 5-7 and high Curie temperatures (c. 1000 ⢠C). Recent studies have shown the intermediary compound Co 2 Fe x Mn (1âx) Si with xâ0.4 to be eminently promising for device applications with a low Gilbert damping parameter 8 and record 75% room temperature GMR ratio. 9 Efforts to induce PMA in the Heuslers have focused on compounds containing Fe on MgO (eg. Co 2 FeAl 10,11 ). This was guided by earlier studies of CoFeB/MgO where the PMA is thought to have its origin in the Fe-O hybridization. 3 PMA has recently been reported in Co 2 MnSi in CMS/Pd multilayer stacks on MgO, 12 and for Pd buffered Co 2 Fe x Mn 1âx Si on MgO, 13 but the details of the PMA and the contribution of the various interfaces remains unclear. Here, we demonstrate PMA in MgO/CFMS/Pd stacks, and show that both interfaces are important for this effect.Samples were grown by DC magnetron sputtering in a Kurt J Lesker CMS-18 UHV system with a base pressure of 2 Ă 10 â8 Torr. Multilayer stacks consisting of MgO(2)/CFMS(t CFMS )/Pd(2.5), where the number in parentheses is the nominal layer thickness in nm, were grown on 10 Ă 10mm Si/SiO 2 substrates at room temperature and post-growth annealed in-situ for 1 hour at 300 ⢠C with an in-plane magnetic field of 170 Oe. MgO was RF sputtered with 100 W power in 3 mTorr Ar, giving a ...