We have developed embedded thin-film micro-strip-line-based sensor chips working in terahertz regime. In the chip, terahertz waves are generated and detected with femtosecond optical pulses accessed from the back side of the chips. Moreover, the spectroscopic sensitivity can be freely adjusted by changing the thickness of a polyimide cover layer. They make it easy to measure polar liquids. The measurement of water is demonstrated with spectral range from 30GHzto1–1.5THz, where the upper limit depends on the thickness of the cover layer.

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