Increasing energy conversion efficiency without any extra cost is required for crystalline silicon (c-Si) solar cells. Laser doping (LD) can meet these requirements because it can be performed in an ambient atmosphere at room temperature. In this study, spin-coated phosphorus silicate glass (PSG) was formed on textured c-Si as a precursor for LD. We found that after LD, the reinforcement of the interface between PSG and the Si surface improved the photovoltaic characteristics V
oc and J
sc. The interface was reinforced by changing the c-Si surface from hydrophobic to hydrophilic before spin coating. The reinforced interface led to a reduction in the number of surface voids and an enhancement of the transfer of dopant atoms.
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