Abstract-In this paper, we have studied the impact of quantum confinement on the performance of n-type silicon nanowire transistors (NWTs) for application in advanced CMOS technologies. The 3-D drift-diffusion simulations based on the density gradient approach that has been calibrated with respect to the solution of the Schrödinger equation in 2-D cross sections along the direction of the transport are presented. The simulated NWTs have cross sections and dimensional characteristics representative of the transistors expected at a 7-nm CMOS technology. Different gate lengths, cross-sectional shapes, spacer thicknesses, and doping steepness were considered. We have studied the impact of the quantum corrections on the gate capacitance, mobile charge in the channel, drain-induced barrier lowering, and subthreshold slope. The mobile charge to gate capacitance ratio, which is an indicator of the intrinsic speed of the NWTs, is also investigated. We have also estimated the optimal gate length for different NWT design conditions.

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In this paper we present a comprehensive computational study of silicon nanowire transistor (SNT) and a SNM SRAM cell based on advanced design technology cooptimization (DTCO) TCAD tools. Utilizing this methodology, we provide guidelines and solutions for 5 nm and beyond in CMOS technology. At first, drift-diffusion (DD) results are fully calibrated against a PoissonSchrodinger (PS) solution to calibrate density-gradient quantum corrections, and ensemble Monte Carlo (EMC) simulations to calibrate transport models. The calibrated DD gives us the capability to simulate statistical variability in nanowire transistors of the 5nm node and beyond accurately and efficiently. Various SNT structures are evaluated in terms of device figures of merit, and optimization of SNTs in terms of electrostatics driven performance is carried out. A variability-aware hierarchical compact model approach for SNT is adopted and used for statistical SRAM simulation near the "scaling limit". The scaling of SNTs beyond the 5 nm is also discussed.

Impact of quantum confinement on transport and the electrostatic driven performance of silicon nanowire transistors at the scaling limit. Solid-State Electronics, 129, pp. 73-80. (doi:10.1016/j.sse.2016 This is the author's final accepted version.There may be differences between this version and the published version. You are advised to consult the publisher's version if you wish to cite from it.http://eprints.gla.ac.uk/133442/ Deposited on: 04 January 2017 Enlighten -Research publications by members of the University of Glasgow http://eprints.gla.ac.uk 1  Abstract-In this work we investigate the impact of quantum mechanical effects on the device performance of n-type silicon nanowire transistors (NWT) for possible future CMOS applications at the scaling limit. For the purpose of this paper, we created Si NWTs with two channel crystallographic orientations <110> and <100> and six different cross-section profiles. In the first part, we study the impact of quantum corrections on the gate capacitance and mobile charge in the channel. The mobile charge to gate capacitance ratio, which is an indicator of the intrinsic performance of the NWTs, is also investigated. The influence of the rotating of the NWTs cross-sectional geometry by 90 o on charge distribution in the channel is also studied. We compare the correlation between the charge profile in the channel and cross-sectional dimension for circular transistor with four different cross-sections diameters: 5nm, 6nm, 7nm and 8nm. In the second part of this paper, we expand the computational study by including different gate lengths for some of the Si NWTs. As a result, we establish a correlation between the mobile charge distribution in the channel and the gate capacitance, drain-induced barrier lowering (DIBL) and the subthreshold slope (SS). All calculations are based on a quantum mechanical description of the mobile charge distribution in the channel. This description is based on the solution of the Schrödinger equation in NWT cross sections along the current path, which is mandatory for nanowires with such ultra-scale dimensions.