A new chemical sensor based on reverse-biased graphene/Si heterojunction diode has been developed that exhibits extremely high bias-dependent molecular detection sensitivity and low operating power. The device takes advantage of graphene's atomically thin nature, which enables molecular adsorption on its surface to directly alter graphene/Si interface barrier height, thus affecting the junction current exponentially when operated in reverse bias and resulting in ultrahigh sensitivity. By operating the device in reverse bias, the work function of graphene, and hence the barrier height at the graphene/Si heterointerface, can be controlled by the bias magnitude, leading to a wide tunability of the molecular detection sensitivity. Such sensitivity control is also possible by carefully selecting the graphene/Si heterojunction Schottky barrier height. Compared to a conventional graphene amperometric sensor fabricated on the same chip, the proposed sensor demonstrated 13 times higher sensitivity for NO₂ and 3 times higher for NH₃ in ambient conditions, while consuming ∼500 times less power for same magnitude of applied voltage bias. The sensing mechanism based on heterojunction Schottky barrier height change has been confirmed using capacitance-voltage measurements.
Molten KOH etching was implemented on SiC substrates before growing epilayers on them. It was found that the creation of basal plane dislocation (BPD) etch pits on the substrates can greatly enhance the conversion of BPDs to threading edge dislocations during epitaxy, and thus low BPD density and BPD-free SiC epilayers are obtained by this method. The reason why BPD etch pits can promote the earlier conversion is discussed. The SiC epilayer growth by this method is very promising in overcoming forward voltage drop degradation of SiC PiN diodes.
A reverse bias tunable Pd- and Pt-functionalized graphene/Si heterostructure Schottky diode H2 sensor has been demonstrated. Compared to the graphene chemiresistor sensor, the chemi-diode sensor offers more than one order of magnitude higher sensitivity as the molecular adsorption induced Schottky barrier height change causes the heterojunction current to vary exponentially in reverse bias. The reverse bias operation also enables low power consumption, as well as modulation of the atomically thin graphene's Fermi level, leading to tunable sensitivity and detection of H₂ down to the sub-ppm range.
Micro/nanomechanical and tribological characterization of SiC has been carried out. For comparison, measurements on SiC, CoCrMo, Ti-6Al-4V, and stainless steel have also been made. Hardness and elastic modulus of these materials were measured by nanoindentation using a nanoindenter. The nanoindentation impressions were imaged using an atomic force microscope (AFM). Scratch, friction, and wear properties were measured using an accelerated microtribometer. Scratch and wear damages were studied using a scanning electron microscope (SEM). It is found that SiC exhibits higher hardness, elastic modulus, scratch resistance as well as lower friction with fewer and smaller debris particles compared to other materials. These results show that SiC possesses superior mechanical and tribological properties that make it an ideal material for use in orthopedic and other biomedical applications.
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