This work investigates the behavior of commercial and custom Quartz tuning forkss (QTF) under humidity variations. The QTFs were placed inside a humidity chamber and the parameters were studied with a setup to record the resonance frequency and quality factor by resonance tracking. The variations of these parameters that led to a 1% theoretical error on the Quartz Enhanced Photoacoustic Spectroscopy (QEPAS) signal were defined. At a controlled level of humidity, the commercial and custom QTFs present similar results. Therefore, commercial QTFs appear to be a very good candidates for QEPAS as they are also affordable and small. When the humidity increases from 30 to 90 %RH, the variations in the custom QTFs’ parameters remain suitable, while commercial QTFs show unpredictable behavior.

An enhanced MEMS capacitive sensor is developed for photoacoustic gas detection. This work attempts to address the lack of the literature regarding integrated and compact silicon-based photoacoustic gas sensors. The proposed mechanical resonator combines the advantages of silicon technology used in MEMS microphones and the high-quality factor, characteristic of quartz tuning fork (QTF). The suggested design focuses on a functional partitioning of the structure to simultaneously enhance the collection of the photoacoustic energy, overcome viscous damping, and provide high nominal capacitance. The sensor is modeled and fabricated using silicon-on-insulator (SOI) wafers. First, an electrical characterization is performed to evaluate the resonator frequency response and nominal capacitance. Then, under photoacoustic excitation and without using an acoustic cavity, the viability and the linearity of the sensor are demonstrated by performing measurements on calibrated concentrations of methane in dry nitrogen. In the first harmonic detection, the limit of detection (LOD) is 104 ppmv (for 1 s integration time), leading to a normalized noise equivalent absorption coefficient (NNEA) of 8.6 ⋅ 10−8 Wcm−1 Hz−1/2, which is better than that of bare Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS), a state-of-the-art reference to compact and selective gas sensors.