Our novel gantry-independent robotic CBCT system provides high-accuracy volumetric image guidance for proton therapy. Advances in knowledge: Ceiling-mounted robotic CBCT provides a viable option than CT on-rails for partial gantry and fixed-beam proton systems with the added advantage of acquiring images at the treatment isocentre.
For the next generation reticle fabrication, one of the key technologies is a high accelerating voltage EB writing system in combination with CAR (Chemically Amplified Resist) process. So we have evaluated an advanced electron beam mask-writing system (EBM-21OVS/Toshiba Machine, Ltd)1 using EPOO2 resist (Tokyo Ohka, Ltd) and RE5 140P (Hitachi chemical, Ltd). The system adopts accelerating voltage of 50kV, variable shaped beam, vector scanning, continuous moving stage and 230mm mask capability. In the results of the exposure evaluations, using 4 pass writing strategy, global positioning accuracy of 23nm (3 a ), local positioning accuracy of l6nm (3 a ), global CD accuracy of 1 mm (3 a ), local CD accuracy of 14.5nm (3 a ), [IS CD linearity of 23nm and stitching accuracy of 2Onm were obtained. These results are satisfactory for our 1st target.
Superconducting Bi,Pb–Sr–Ca–Cu–O material has been prepared by an improved coprecipitation method; mixed metal oxalates as the precursor were precipitated from a homogeneous acetic acid solution of the constituent metal acetates and dimethyl oxalate. This method permits easier fabrication of the superconducting material which is almost free from low-Tc phase.
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