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A tactile sensor array covered by a projected cylindrical elastomer has been designed and fabricated for crosstalk reduction among sensor elements caused by the lateral deformation of the elastomer. The analysis of elastomer deformation by the finite element method showed that the optimal thickness of the flat elastomer between cylinders and the substrate is 50–100 µm, because the sensor structure has not only a low crosstalk but also a high robustness. A tactile sensor array having the flat elastomer of 70 µm thickness has little crosstalk and high robustness.

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ZnO crystals were grown on Zn-polar ZnO substrates by cold-wall chemical vapor transport (CWCVT) using a mixture of Ar, H 2 O, and CO 2 gases. A high growth rate of 125 mm/h was achieved by reducing the amount of excess Zn vapor in a graphite crucible, in which ZnO crystal growth was carried out. The increase in CO 2 partial pressure prevents oxygen deficiency and improves the structural and electrical properties of ZnO crystals. The electron concentration and Hall mobility of the ZnO crystal grown at the CO 2 partial pressure of 230 Torr were 7 Â 10 16 cm À3 and 190 cm 2 V À1 s À1 , respectively. #

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