Tactile sensor array using microcantilever with nickel–chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection

Sohgawa, Masayuki; Hirashima, Daiki; Moriguchi, Yusuke; Uematsu, Tatsuya; Mito, Wataru; Kanashima, Takeshi; Okuyama, Masanori; Noma, Hiroyasu

doi:10.1016/j.sna.2011.12.055

Cited by 76 publications

(32 citation statements)

References 12 publications

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“…A video camera in the box records gripping states. Adapted from [36]. the diaphragm upward and summing outputs of top electrodes divided to two parts.…”

Section: Resultsmentioning

confidence: 99%

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Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Okuyama¹,

Yamashita²,

Noda³

et al. 2012

Transactions on Electrical and Electronic Materials

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Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/SiO 2 and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or Si:B + piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

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“…A video camera in the box records gripping states. Adapted from [36]. the diaphragm upward and summing outputs of top electrodes divided to two parts.…”

Section: Resultsmentioning

confidence: 99%

“…12 [36,37]. A two-finger type of robot hand with two degrees of freedom was used and a tactile sensor with three cantilevers was placed at an inner side of the finger.…”

Section: Judgment Of Gripping Status By Tactile Sensormentioning

confidence: 99%

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Okuyama¹,

Yamashita²,

Noda³

et al. 2012

Transactions on Electrical and Electronic Materials

Self Cite

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“…(5) Hence, a multimodal sensing of various physical and optical properties is needed to characterize an object's texture more accurately. In our previous work, we developed a multi-axial micro-electromechanical systems (MEMS) tactile sensor that can detect normal and shear forces using a strain gauge film on microcantilevers (6) and demonstrated that the surface texture of various objects can be evaluated by the active touching of this sensor. The feature quantities for an object depending on surface texture, including hardness/softness, friction, surface roughness, and other physical characteristics, have been extracted from the sensor output change in the active touching measurement and analyzed by principal component analysis for the classification of an object using the features of the surface texture.…”

Section: Introductionmentioning

confidence: 99%

Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor

2017

Sensors and Materials

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In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

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“…They mounted Center of Pressure (CoP) sensors on the robot hand, and slip could be detected immediately before it occurred, based on the falling curve of the force output of the CoP sensors [8]. In [9], Masayuki et al found that the amplified output voltage of the fabricated tactile sensor changed depending on the gripping status. The gripping status was classified by the outputs of two sensor elements by using the k-Nearest Neighbor method [10][11].…”

Section: Introductionmentioning

confidence: 99%

A new slip-detection method based on pairwise high frequency components of capacitive sensor signals

Yang

Cao

et al. 2015

2015 5th International Conference on Information Science and Technology (ICIST)

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In this paper, a novel method for slip detection using a capacitive sensor is proposed. We perform the Discrete Wavelet Transform (DWT) on the original signals of sensor. By comparing different wavelets, we find that the Haar wavelet is the most suitable to separate different frequency components.After performing the DWT by using the Haar wavelet, the separated high frequency components are pairwise due to properties of the Haar wavelet. Different from setting thresholds to detect object slip, our method detects slip by observing the variation trend of pairwise high frequency components.Meanwhile, we can distinguish signals of object loading and slip respectively. We carry out experiments on several objects with different surface properties and the results are consistent with our observations.

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Tactile sensor array using microcantilever with nickel–chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection

Cited by 76 publications

References 12 publications

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor

A new slip-detection method based on pairwise high frequency components of capacitive sensor signals

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