TiO2 nanotubes and nanoparticles were obtained by anodization of metallic Ti foil in a 0.5% HF, 1:7 acetic acid aqueous solution. Voltages of 23 and 35 V were applied and the anodization time was varied. Scanning Electron Microscope (SEM) and Raman scattering spectroscopy were utilized to analyze the obtained structures. It was observed that nanotubes with larger diameter are obtained for higher anodization voltages, also a morphology and crystalline phase dependency on anodization time, for a given voltage, were observed. Nanotubes with diameters in the 20nm to 90 nm range were obtained for different anodization times and voltages.
TiO2 nanotubes arrays were obtained by Ti foil and Ti thin films on glass substrate, deposited by RF magnetron sputtering, anodization in a NH4F organic solution with different anodization voltages and times. Annealing treatment to promote nanotubes crystallization in anatase phase was done. Different photolithography pattern techniques were utilized to define nanotubes lines from 10 to 90µm wide. The obtained samples were characterized by Raman spectroscopy and Scanning Electron Microscopy (SEM).
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