In this paper, the concept and first results of a novel toolbox for nanoscale characterization are presented. A nanorobotic AFM system is being developed and integrated into a high resolution SEM/FIB system allowing nanoanalysis, -manipulation and -structuring. The compact and modular AFM setup enables probe-as well as sample-scanning and uses self-sensing AFM cantilevers. Image fusion algorithms are developed to merge SEM and AFM information for hybrid analysis of nanoscale objects. A commercial AFM controller is embedded into a special control system architecture that allows for automation of nanomanipulation sequences.

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This paper presents different image processing methods and algorithms, which are needed to enable the reliable automation of nanohandling processes. These applications use the scanning electron microscope (SEM) as a visual sensor. SEMs are widespread and powerful tools for manipulations on the nanoscale. Due to the timing constraints in automated setups, the trade-off between SEM scanning speed and image quality is a concern for algorithm development. Tasks to be fulfilled on image data provided by the SEM include object recognition, object tracking and depth estimation. A selection of algorithms that have been applied in automated setups for nanomanipulation is discussed and validated.

Abstract-The propulsion of nano-ferromagnetic objects by means of MRI gradients is a promising approach to enable new forms of therapy. In this work, necessary techniques are presented to make this approach work. This includes path planning algorithms working on MRI data, ferromagnetic artifact imaging and a tracking algorithm which delivers position feedback for the microdevice and a propulsion sequence to enable interleaved magnetic propulsion and imaging. Using a dedicated software environment integrating path-planning methods and real-time tracking, a clinical MRI system is adapted to provide this new functionality for potential controlled interventional targeted therapeutic applications. Through MRI-based sensing analysis, this paper aims to propose a framework to plan a robust pathway to enhance the navigation ability to reach deep locations in human body. The proposed approaches are validated with different experiments.