An approach for measuring force-dependent properties of microscopic structures commonly found in MEMS has been developed. The system has the capability of measuring forces and deflections of the order of micro-newtons and micro-meters, respectively. By implementing a visual inspection system, force is applied to localized areas on a beam, and the resulting force-deflection characteristic can be obtained. From this beam stiffness and effective elastic modulus can be calculated. These results were compared to simulation, which was performed using ANSYS FEM code. In addition, by applying a known mechanical force, direct correlation to voltage and thus electrostatic force can be obtained, which also elucidates the magnitude of the electrostatic feedback effect. Characterization of other force-dependent parameters such as DC contact resistance and isolation/insertion loss at RF and microwave frequencies was obtained experimentally, from which parameters such as lumped capacitance can be extracted.

The public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden, AFRL/SNDI SPONSORING/MONITORING AGENCY REPORT NUMBER(S) AFRL-SN-WP-TP-2002-108 DISTRIBUTION/AVAILABILITY STATEMENTApproved for public release; distribution is unlimited. This document was submitted to DTIC with color content. When the document was processed by DTIC, the color content was lost. ABSTRACT (Maximum 200 Words)An approach for measuring force-dependent properties of microscopic structures commonly found in MEMS has been developed. The system has the capability of measuring forces and deflections on the order of micro-newtons and micro-meters, respectively. By implementing a visual inspection system, force can be selectively applied to localized areas on a beam, and the resulting forcedeflection characteristic obtained from which beam stiffness and effective elastic modulus can be calculated. These results were compared to simulation, which was performed using ANSYS FEM code. In addition, by applying a known mechanical force, direct correlation to voltage and thus electrostatic force can be obtained, which also elucidates the magnitude of the electrostatic feedback effect. Characterization of other force-dependent parameters such as contact resistance at DC, in addition to isolation/insertion loss at RF and microwave frequencies was obtained experimentally from which parameters such as lumped capacitance and inductance can be extracted. SUBJECT TERMS ABSTRACTAn approach for measuring force-dependent properties of microscopic structures commonly found in MEMS has been developed. The system has the capability of measuring forces and deflections of the order of micro-newtons and micro-meters, respectively. By implementing a visual inspection system, force can be selectively applied to localized areas on a beam, and the resulting force-deflection characteristic obtained from which beam stiffness and effective elastic modulus can be calculated. These results were compared to simulation, which was performed using ANSYS FEM code. In addition, by applying a known mechanical force, direct correlation to voltage and thus electrostatic force can be obtained, which also elucidates the magnitude of the electrostatic feedback effect. Characterization of other force-dependent parameters such as contact resistance at DC, in addition to isolation/insertion loss at RF and microwave frequencies was obtained experimentally from which parameters such as lumped capacitance and inductance can be extracted.

No abstract

No abstract