In this study, we performed a mass-spectrometric study of cluster ions scattered on glass surfaces covered with ferrocene molecules under the incidence of 4.8 keV-C q+ 60 (q = 1 and 2) ions. A couple of optical flats covered with 11-ferrocenyl-1-undecanethiol self-assembled monolayer surfaces (Fc-thiol-SAMs) faced each other with a shape called a tapered planar channel (TPC) and C60 ions entered the wider opening gap. The mass and charge of each ion exiting from the narrower gap of the TPC were successfully analyzed using time-of-flight mass spectrometry combined with the parallel plate charge separation method. When the TPC was tilted by 2 • with respect to the C60 ion beam axis, the mass distribution peak shifted to ∼730 u. Furthermore, we conducted an elemental analysis of the scattered particles deposited on a Si substrate by inductively coupled plasma mass spectrometry. A significant increase in the amount of iron atoms was confirmed for the deposited substrate, as compared with non-deposited substrates.