No abstract

Utilizing suspended gate field-effect transistors (SGFETs), a displacement sensing mechanism is proposed in this paper. The design, numerical simulations, and fabrication process of the SGFET are presented. The SGFET arrays and the comb-drive actuator are integrated to form a MEMS position encoder. The resolution of the proposed MEMS position encoder is 6 μm over a 54 μm travel range. By arranging the SGFETs into arrays, position feedback over a large travel range is achieved for a comb-drive actuator.

Bipolar plate is the key component of proton exchange membrane fuel cells. Due to the factors of rapid and mass production, the stamping process is selected to manufacture the bipolar metal plates. First, the stress-strain curve is performed by universal material testing machine.The stress-strain curve is necessary for bipolar plate stamping simultion. The maximum forging load and effective stress distribution of bipolar plate stamping are determined by finite element analysis. Finally, the effect of the traditional crank stamping on the flatness and section thickness of stainless steel bipolar plate are observed by experiments.