A 0.2 V, 7.5 µW, 20 kHz Σ∆ modulator with 69 dB SNR in 90 nm CMOS Abstract-This paper presents a frequency-to-digital Σ∆ modulator designed in a digital 90 nm CMOS process, operating with a supply voltage of 0.2 V. For a 7.5 µW power consumption, the SNR is 68.9 dB and the SNDR is 60.3 dB over a 20 Hz-20 kHz bandwidth. This work shows that the SNR/SNDR performance of this kind of Σ∆ converter can be adjusted over a wide range, while maintaining a state-of-the-art figure-of-merit of 82 fJ/conversion.
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