Test leaks with a gas flow to atmospheric pressure are often called sniffer test leaks. They are used to calibrate leak detectors for sniffing applications. Sniffer test leaks need calibration against a standard. A primary standard for the calibration of sniffer test leaks with relatively low measurement uncertainties is described. It is assured that the measurement result is traceable to the relevant SI units and that there is a well-known and complete measurement uncertainty budget. The measurement range of the system is from 4 × 10−11 mol s−1 (corresponding to 10−4 Pa l s−1 at 23 °C) to 4 × 10−9 mol s−1 (10−2 Pa l s−1 at 23 °C), which is the most often needed range in industry of around 1 g loss per year of the cooling agent R134a. The temperature where the calibration can be carried out may vary from 18 °C to 30 °C. The flow rate of any test gas not condensing in this temperature range can be measured.

Keywords:Focused ion beam Nanotechnology Si 3 N 4 SEM STEM AFM Standard leak Gas flow meter Leak rate measurement Vacuum metrology DSMC a b s t r a c t Short tubes with diameters of the order of 200 nm were drilled into silicon nitride (Si 3 N 4 ) membranes of 200 nm thickness by focused ion beam technology and examined as leak elements for vacuum technology applications. These nano-holes exhibit molecular flow in the pressure range from high vacuum up to 10 kPa and can therefore be used as predictable leak elements for any non-condensable gas species. The geometrical dimensions were determined by SEM, STEM and AFM techniques. By Direct Simulation Monte Carlo method the conductances of these short tubes were calculated from the measured dimensions. The calculated conductance agreed with the value measured by comparison with a primary gas flowmeter within their respective uncertainties.

Quantitative leak tests with vacuum technology have become an important tool in industry for safety and operational reasons and to meet environmental regulations. In the absence of a relevant key comparison, so far, there are no calibration measurement capabilities published in the BIPM data base. To enable national metrology institutes providing service for leak rate calibrations to apply for these entries in the data base and to ensure international equivalence in this field, key comparison CCM.P-K12 was organized. The goal of this comparison was to compare the national calibration standards and procedures for helium leak rates. Two helium permeation leak elements of 4×10−11 mol/s (L1) and 8×10−14 mol/s (L2) served as transfer standards and were measured by 11 national metrology institutes for L1 and 6 national metrology institutes for L2. Equivalence could be shown for 8 laboratories in the case of L1 and for all 6 in the case of L2. Three different evaluation methods were applied and are presented in this report, but the random effects model was accepted as most suitable in our case.Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/.The final report has been peer-reviewed and approved for publication by the CCM, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

No abstract

No abstract