The aim of this paper is to present two different types of MEMS switch structures developed in IMT: bridge and cantilever. For these two configurations were chosen different length of bridges and cantilevers; also, for the actuation pads used were considered different size. Finite Element Method simulations were performed in order to determine the pull-in voltage. Comparison between simulated and measured results will be presented for the bridge type switch structure.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.