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Diethyl germanium bis-picolinate, [Et 2 Ge(O 2 CC 5 H 4 N) 2 ], and trimethyl germanium quinaldate, [Me 3 Ge(O 2 CC 9 H 6 N)], have been used as precursors for deposition of thin films of germanium by aerosol assisted chemical vapour deposition (AACVD). The thermogravimetric analysis revealed complete volatilization of complexes under nitrogen atmosphere. Germanium thin films were deposited on silicon wafers at 700 • C employing AACVD method. These films on oxidation under an oxygen atmosphere at 600 • C yield GeO 2. Both Ge and GeO 2 films were characterized by XRD, SEM and EDS measurements. Their electrical properties were assessed by current-voltage (I-V) characterization.

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