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This letter demonstrates the direct laser printing of polymers on capacitive micromechanical arrays for the realization of a chemical sensor. Each sensor of a single chip array is composed of a thin Si membrane covered by a chemically sensitive polymer layer by means of a direct laser printing technique. We present the high spatial resolution deposition of three different sensitive polymer materials by the liquid phase laser induced forward transfer process. We also show that the optimum sensitivity of the sensors can be achieved by varying the percentage of the coverage of the sensors’ membranes with the polymer.

In this paper, we investigated the effect of humidity on paper substrates and propose a simple and low-cost method for their passivation using ZnO nanoparticles. To this end, we built paper-based microdevices based on an interdigitated electrode (IDE) configuration by means of a mask-less laser patterning method on simple commercial printing papers. Initial resistive measurements indicate that a paper substrate with a porous surface can be used as a cost-effective, sensitive and disposable humidity sensor in the 20% to 70% relative humidity (RH) range. Successive spin-coated layers of ZnO nanoparticles then, control the effect of humidity. Using this approach, the sensors become passive to relative humidity changes, paving the way to the development of ZnO-based gas sensors on paper substrates insensitive to humidity.

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