The paper considers a method of tungsten surface carbidization using a beam-plasma discharge (BPD), which was implemented in a plasma-beam installation (PBI). The advantage of this method is to create conditions for chemical reactions and physical processes as close as possible to those possible in thermonuclear installations. The BPD makes it possible to generate plasma using different working gases. Methane was used as a plasma-forming gas. The working gas pressure in a chamber was (1,3-1,4)·10-1 Pa. The temperature dependence of the carbidized layer formation on the tungsten surface under plasma irradiation was determined in the temperature range of 700-1700 °C. The formation of tungsten carbides in surface layers was confirmed by SEM and X-ray diffraction analysis. It was found that interaction between tungsten and methane in a wide temperature range can proceed with simultaneous or sequential formation of the carbide phases W2C and WC.
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