Measured Equation of Invariance(MEI) is a new concej't in computational electromagnetics. It has been demonstrated that the M E I technique can be used t o terminate the meshes very close to the object boundary and still strictly preserves the sparsity of the F D equations. Therefore, the final system matrzx encountered by M E I is a sparse matrix with site similar t o that of integral equation methods. Howe v w , complicated Green's function and disagreeable Sommwfeld integrals make the traditional M E I very dificult, if not impossible, t o be applied t o analyze multilayer and multiconductor interconnects. In this paper, we propose the Geometry Independent MEI(GIMEI) which substantially improved the original M E I method. W e use G I M E Ifov capacitance extraction of general three-dimension VLSI inkerconnect. Numerical results are in good agreement with published data and those obtained by using F A S T C A P [l], while G I M E I is generally an order of magnitude faster than FfLSTCAP and uses significant less memory than F A S T -CAP.