(MEI) is a new concept in computational electromagnetics. It has been demonstrated that the MEI technique can be used to terminate the meshes very close to the object boundary and still strictly preserves the sparsity of the FD equations. Therefore, the nal system matrix encountered by MEI is a sparse matrix with size similar to that of integral equation methods. However, complicated Green's function, disagreeable Sommerfeld integrals, and very di cult umbilical meshes for multiconductors make the traditional MEI very di cult, if not impossible, to be applied to analyze multilayer and multiconductor interconnects. In this paper, we propose the Geometry Independent MEI (GIMEI) which substantially improved the original MEI method. We use GIMEI for capacitance extraction of general two-dimension and threedimension VLSI interconnect. Numerical results are in good agreement with published data and those obtained by using FASTCAP from MIT and some other commercial tools, while GIMEI are generally an order of magnitude faster than FASTCAP with much less memory usage. Keywords|interconnects, fast 3D extraction, Measured Equation of Invariance (MEI), geometry independent, measuring loop, capacitance matrix

Measured Equation of Invariance(MEI) is a new concept in computational electromagnetics. It has been demonstrated that the MEI technique can be used to terminate the meshes very close to the object boundary and still strictly preserves the sparsity of the FD equations. Therefore, the nal system matrix encountered by MEI is a sparse matrix with size similar to that of integral equation methods. However, complicated Green's function and disagreeable Sommerfeld integrals make the traditional MEI very dicult, if not impossible, to be applied to analyze multilayer and multiconductor interconnects. In this paper, we propose the Geometry Independent MEI(GIMEI) which substantially improved the original MEI method. We use GIMEI for capacitance extraction of general three-dimension VLSI interconnect. Numerical results are i n g o o d agreement with published data and those obtained by using FASTCAP [1], while GIMEI is generally an order of magnitude faster than FASTCAP and uses signicant less memory than FAST-CAP.

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Measured Equation of Invariance(MEI) is a new concej't in computational electromagnetics. It has been demonstrated that the M E I technique can be used t o terminate the meshes very close to the object boundary and still strictly preserves the sparsity of the F D equations. Therefore, the final system matrzx encountered by M E I is a sparse matrix with site similar t o that of integral equation methods. Howe v w , complicated Green's function and disagreeable Sommwfeld integrals make the traditional M E I very dificult, if not impossible, t o be applied t o analyze multilayer and multiconductor interconnects. In this paper, we propose the Geometry Independent MEI(GIMEI) which substantially improved the original M E I method. W e use G I M E Ifov capacitance extraction of general three-dimension VLSI inkerconnect. Numerical results are in good agreement with published data and those obtained by using F A S T C A P [l], while G I M E I is generally an order of magnitude faster than FfLSTCAP and uses significant less memory than F A S T -CAP.