No abstract

The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through establishing a three-dimensional model of an elastic-beam delay mechanism, establishing the force and the parameters of an elastic-beam delay mechanism, deriving the mathematical model according to the rigid dynamic mechanics theory, establishing the finite element model by using Ls-dyna solver of the Ansys software, and carrying out the centrifugal test. Simulation and test results match theoretical results quite well. It is believed that the elastic-beam delaying mechanism is quite effective and useful to slow the speed of the movable part in MEMS devices.

The fracture of movable part is a serious issue in micro-electro-mechanical systems (MEMS) device application. However, its fracture mechanism is not clear yet. The fracture mechanism of movable part based on empirical electron theory (EET) of solids and molecules, in which fracture model is built based on valence electron structure and broken bond of the crystal plane is clarified. Simulation and test results match EET-fracture model quite well with low errors of 8.22 and 5.95%, respectively, which shows a good accuracy among existing fracture models. It is believed that EET-fracture model is quite effective and useful to evaluate movable part function in the research of MEMS devices.

In this paper, a planar-zigzag-type multi-slot S&A system has been proposed. The system consists of the MEMS W-type micro-spring, slider and zigzag slot. Through simulating and analyzing the micro-spring by applying ANSYS, establishing the mathematical model of the motion for the slider and simulating the physical model by the non-linear dynamic mechanics, appropriate Micro-spring, slider and zigzag slot are designed to meet two items, one item is the micro-spring doesn't have plastic deflection under the drop overload conditions to ensure safety of the system; the other item is the slider slides to the bottom under the launch overload conditions to ensure arming of the system. Through the experiment, the feasibility of the above research is confirmed.