Fracture mechanism of movable part in micro‐electro‐mechanical systems device based on empirical electron theory

Fufu, Wang; Lou, Wenzhong; Ye, Feng

doi:10.1049/mnl.2015.0309

Cited by 6 publications

(4 citation statements)

References 16 publications

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“…The major damping source of MEMS devices is the squeeze film effect, which has nonlinearity with respect to the displacement of the device and can be influenced by packaging leaking [10]. MEMS devices utilise mechanical cantilevers as springs [11]. The stiffness of the cantilevers has good linearities when the bending motion is small.…”

Section: Kinematics Of Ppasmentioning

confidence: 99%

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Feedback posicast control for micromachined electrostatic actuators

Dean

Hung

et al. 2016

Micro & Nano Letters

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Micro-electro-mechanical systems (MEMS) typically have low damping ratios. Although it benefits many applications because they require low energy loss, this characteristic generates large overshoots and long settling times to reach steady state. A feedback posicast controller that can improve the performance of MEMS electrostatic actuators is proposed. This method inserts a posicast controller inside the feedback loop and combines it with a proportional-integral controller. The advantages of this technique include easily implemented control laws, additional velocity sensors or estimators are not required and the parametric adjustment of the controller is less sensitive to the model's nonlinearity. A numerical study verifies that the proposed method is valid.

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Section: Kinematics Of Ppasmentioning

confidence: 99%

“…MEMS devices utilise mechanical cantilevers as springs [11]. The stiffness of the cantilevers has good linearities when the bending motion is small.…”

Section: Challenges For Mems Damping Controlmentioning

confidence: 99%

Feedback posicast control for micromachined electrostatic actuators

Dean

Hung

et al. 2016

Micro & Nano Letters

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“…Traditional S & A devices can accomplish the safety and arming functions of a fuse, however, this is not available for modern weapon because of its large size, low accuracy, and poor anti-overload capability [ 7 , 8 , 9 , 10 ]. The miniaturization of the S & A device for fuses contributes a lot to the system control of munitions, because weapons with S & A devices of a smaller size can provide more space for other devices [ 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

Design of High-Reliability Micro Safety and Arming Devices for a Small Caliber Projectile

Wang

Lou

et al. 2017

Micromachines

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With the development of micro technology, the fuse for small-caliber projectiles tends to be miniaturized and intelligent, the traditional fuse no longer meets the requirements. In this paper, we demonstrate a micro safety and arming (S & A) device with small volume and high reliability in small caliber projectile platforms. The working principle of S & A devices is that a centrifugal insurance mechanism could deform under a centrifugal load and thus cause fuse safety arming. The centrifugal insurance mechanism is designed theoretically, verified by simulation and experimental methods. The experimental results show that, when the rotary speed is over 36,000 rpm, the fuse was armed safely. In addition, the experimental, simulation, and theoretical results are basically consistent, and indicate that the centrifugal insurance mechanism meets the expected criteria.

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“…In recent years, the U.S. fuze annual conferences reported that the performance of on-chip-based S&A device is tested using the missile warhead at present [26][27][28][29][30], and the development trend of fuze technology is on-chip integration of machinery, electronics and pyrotechnics in the future. On this basis, our term developed a MEMS S&A device used in small-caliber ammunition innovatively, and the concrete structure as shown in Figure 2 [31][32][33]. The size of the device isΦ14×15 mm (except detonating tube, electric detonator and electric thruster).…”

Section: Introductionmentioning

confidence: 99%

Parametric Study of the Centrifugal Insurance Mechanism in MEMS Safety and Arming Device

Wang¹,

W²,

Feng³

et al. 2017

Preprint

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MEMS (Micro-electromechanical Systems) becomes important increasingly due to the smarter and smaller fuze used in OICW (Objective Individual Combat Weapon). MEMS Safety and Arming (S&A) device is employed in different platforms and regions for small caliber projectile. Therefore, it is necessary to make a parametric study of the MEMS S&A device in different apply environments and explore the main sensitive factors of the MEMS S&A device to provide reference for designs. In this paper, based on the MEMS S&A device designed by our term, theory and finite element models are established, and the centrifugal insurance mechanism of the MEMS S&A device is parametric studied under the different speeds, temperature and thickness of the model by nonlinear dynamic method. By comparing the experimental and predicted results, the established FEM model is verified, and the conclusion is that the temperature and the centrifugal force are the main sensitive factors in the centrifugal insurance mechanism. In summary, we can suggest that the application environment, which the MEMS S&A device is suitable for, is the temperature equal to or slightly greater than normal temperature and the rotating speed higher than35000r/min of small caliber projectile.

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Fracture mechanism of movable part in micro‐electro‐mechanical systems device based on empirical electron theory

Cited by 6 publications

References 16 publications

Feedback posicast control for micromachined electrostatic actuators

Feedback posicast control for micromachined electrostatic actuators

Design of High-Reliability Micro Safety and Arming Devices for a Small Caliber Projectile

Parametric Study of the Centrifugal Insurance Mechanism in MEMS Safety and Arming Device

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