A new approach for the fabrication of n-type porous silicon layer is proposed. A hole-rich p-layer is arranged underneath the n-layer, and the np-junction is under forward biased condition in the etching process. Therefore sufficient holes can drift straight-upward and pass across the np-junction from p-region to n-region to participate in electrochemical reaction during the etching process with an unfailing supply. Illumination is an optional hole-supplier in this approach, so the problem of illumination-depth limitation can be overcome. Strong visible photoluminescence emissions are demonstrated on the hole-poor n-type porous layer at about 650 nm.

The light-emission and current-voltage properties of n-type nanoporous silicon ͑n-NPS͒ with a hole assistance of buried p layer are explored. The influences of anodic current density on the formation, morphology, and properties of n-NPS are measured. Such n-NPS films have nanoscaled pores and high-aspect-ratio pillars. Since the anisotype junction is forward biased during the anodization process, many holes can drift straightupward from p layer and participate in the electrochemical reaction. At room temperature, high peak-to-valley current ratios of about 117.3 can be obtained in negative difference conductance region as well as strong visible light emissions are clearly observed under ultraviolet excitation.

We present a bio-detection system integrated with an adjustable micro-concave mirror. The bio-detection system consists of an adjustable micro-concave mirror, micro flow cytometer chip and optical detection module. The adjustable micro-concave mirror can be fabricated with ease using commercially available MEMS foundry services (such as multiuser MEMS processes, MUMPs) and its curvature can be controlled utilizing thermal or electrical effects. Experimental results show that focal lengths of the micro-concave mirror ranging from 313.5 to 2275.0 𝜇m are achieved. The adjustable micro-concave mirror can be used to increase the efficiency of optical detection and provide a high signal-to-noise ratio. The developed micro-concave mirror is integrated with a micro flow cytometer for cell counting applications. Successful counting of fluorescent-labeled beads is demonstrated using the developed method.

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