The machining effect of different materials electrodes (quenched steel electrode, stainless steel electrode, brass electrode and graphite electrode) and different electrorheological (ER) fluids on the glass was investigated by fine machining experiments using the ER effect instantaneous tiny grinding wheel. Quenched steel electrode and stainless steel electrode can cause bigger and deeper machining region and uniform material removal, while brass electrode and graphite electrode can lead to lower material removal efficiency and nonuniform material removal. The machining trace of zeolite ER fluid is more integrated and deeper apparently than that of SiO2 ER fluid. The processing mechanisms of ER fluid-assisted ultra-precision polishing are analyzed.

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Aiming at the problem that XY motion platform cannot realize high-speed and high-precision machining simultaneously, a high-speed and high-precision laser processing algorithm is proposed based on the macro-micro structure of laser cutter with a laser galvanometer scanner. The velocity planning of macro platform and composite motion is carried out by applying finite impulse response (FIR) filters three times, and velocity planning of micro platform is obtained by vector subtraction method. The motion decomposition of the macro-micro platform is realized accurately. The macro platform is responsible for large-format movement, and the micro platform is responsible for fast-speed turning. Velocity overlap of adjacent segments is employed to improve the machining efficiency. The constraints are established to determine the overlapping time, so that the algorithm can realize high-speed machining without introducing contour error, and ensure that the velocity, acceleration, and jerk of the macro platform can be processed within the limit range. Experiment and simulation analysis show that compared with using only the XY platform, the total machining time of using the macro-micro platform with the algorithm proposed in this paper is reduced by more than 35%.