The MEMS vector hydrophone is a novel acoustic sensor with a “four-beam-cilia” structure. Based on the MEMS vector hydrophone with this structure, the paper studies the method of estimated direction of arrival (DOA). According to various research papers, many algorithms can be applied to vector hydrophones. The beam-forming approach and bar graph approach are described in detail. Laboratory tests by means of the a standing-wave tube are performed to validate the theoretical results. Both the theoretical analysis and the results of tests prove that the proposed MEMS vector hydrophone possesses the desired directional function.

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Film stress is crucial for stringent MEMS/NEMS design. In this paper, novel micromachined flexible suspended thin silicon plates combined with a sub-nanometer optical interferometry measuring setup have been developed to detect stresses in nanometer-scale films as well as ultra low stresses in thin films. By measuring the local out-of-plane curvature of a thin silicon substrate of 15 µm, a bending sensitivity two orders larger than that of the wafer curvature method has been achieved. Residual stresses in LPCVD Si3N4 thin films are measured, which are in good agreement with those extracted by other methods. Since non-contact optical instruments are used to detect all the parameters and the boundary conditions are well characterized, reproducibility better than 1% has been realized. By reusing the testing structures, residual stresses in sputtered metal films are also determined, which vary in a broad range. A stress difference as small as 1.5 MPa within a 30 nm film can be resolved with this metrology, which is among the best in the present reports.

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