We investigated oxide TFT backplane technology to employ the internal gate driver IC (GIP circuit) on 55” 4K OLED TV panel. For the GIP circuit, we developed the high reliability oxide TFTs, especially only ∆0.4 V Vth degradation under 100‐h long‐term PBTS stress and the short channel length TFTs (L = 4.5um) for narrow bezel. Consequently, we demonstrated the 55‐in 4K OLED TV employing the internal gate IC with high reliability and short channel IGZO TFTs.

We proposed 3D heterogeneous opto-electronic integration technology for system-on-silicon (SOS). In order to realize 3D opto-electronic integrated system-on-silicon (SOS), we developed novel heterogeneous integration technology of LSI, MEMS and optoelectronic devices by implementing 3D heterogeneous opto-electronic multi-chip module composed with LSI, passives, MEMS and optoelectronic devices. The electrical interposer mounted with amplitude shift keying (ASK) LSI, LC filter and pressure-sensing MEMS chips and the optical interposer embedded with vertical-cavity surface-emitting laser (VCSEL) and photodiode (PD) chips are precisely bonded to form 3D opto-electronic multi-chip module. Opto-electronic devices are electrically connected via through-silicon vias (TSVs) which were formed into the interposers. Microfluidic channels are formed into the interposer by wafer direct bonding technique. 3D heterogeneous opto-electronic multi-chip module is successfully implemented for the first time.

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We have newly proposed heterogeneous multi-chip module integration technologies in which MEMS and LSI chips are mounted on Si or flexible substrates using a self-assembly method. A large numbers of chips were precisely and simultaneously self-assembled and bonded onto the substrates with high alignment accuracy of approximately 400 nm. Thick MEMS and LSI chips with a thickness of more than 100 μm were electrically connected by unique lateral interconnections formed crossing over chip edges with large step height. We evaluated fundamental electrical characteristics using daisy chains formed crossing over test chips which were face-up bonded onto the substrates by the self-assembly. We obtained excellent characteristics in these daisy chains. In addition, RF test chips with amplitude shift keying (ASK) demodulator and signal processing circuits were self-assembled onto the substrates and electrically connected by the lateral interconnections. We confirmed that these test chips work well.