Magnetic bearings are widely applied in High Temperature Gas-cooled Reactor (HTGR) and auxiliary bearings are important backup and safety components in AMB systems. The dynamic analysis of the AMB rotors touchdown process is an important foundation for designing auxiliary bearings. In this paper, a data-based dynamic analysis of the touchdown process is proposed. The dynamic model of the touchdown process is firstly established and then the nonlinear extended Kalman filtering technique is applied. Based on the dynamic model and Kalman filtering technique, the proposed method can offer estimations of rotor’s displacements, velocities and accelerations from noisy observations. The proposed method is validated by the experiment data from touchdown experiments. The touchdown experiments are performed on an experimental system with a 440kg heavy rotor, the rotational speed in the experiments is 5000RPM and no brake is applied.

In the past several years, DFM (design for manufacturability) is widely used in semiconductor process. DFM is to make layout design optimized for manufacturability's sake. Lithography friendly design (LFD) is one branch of DFM. To enhance process margin of photolithography, layout designers typically modify their layout design with the application of DFM or LFD tools. Despites those application, it is still not enough to realize enough process window as technology node goes to beyond 45nm. For these reasons, OPC (Optical proximity correction) engineers apply additional layout treatment prior to applying OPC. That is called as table-driven retarget, which is typically conducted by rule-based table. Similar to rule-based OPC, table-driven retarget also has limitations in its application.In this paper, we presented a model-based retargeting method to overcome the limitation of table-driven retarget. Once the criteria of process window has been set, we let OPC tool simulate the process window of each layout of design firstly. Then, if the output value of the simulated result cannot meet the preset criteria, OPC tool resizes the layout dimension automatically. OPC tool will do retarget-OPC-retarget iterations until process windows of all of designs become within the criteria. After all, the model-based retarget can guarantee accurate retarget and avoid over or under retarget in order to improve process window of full chip design.

Nonlinear vibrations and their control are critical in improving the magnetic bearings system performance and in the more widely spread use of magnetic bearings system. Multiple objective genetic algorithms (MOGAs) simultaneously optimize a vibration control law and geometrical features of a set of nonlinear magnetic bearings supporting a generic flexible, spinning shaft. The objectives include minimization of the actuator mass, minimization of the power loss, and maximization of the external static load capacity of the rotor. Levitation of the spinning rotor and the nonlinear vibration amplitude by rotor unbalance are constraint conditions according to International Organization for Standardization (ISO) specified standards for the control law search. The finite element method (FEM) was applied to determine the temperature distribution and identify the hot spot of the actuator during steady-state operation. Nonlinearities include magnetic flux saturation, and current and voltage limits of power amplifiers. Pareto frontiers were applied to identify and visualize the best-compromised solutions, which give a most compact design with minimum power loss whose vibration amplitudes satisfy ISO standards.

The active magnetic bearing (AMB) system is a crucial part in the helium circulator system of the 10MW high temperature gas-cooled reactor (HTR-10). Though the AMB has been widely used in industrial fields, it is still limited in the research of the dynamic behavior of AMB’s vertical arranged rotor with axial magnetic load during its drop process. This paper establishes the dynamic model of such drop process by Matlab. Meanwhile using the Hertz contact theory establishes the contact model of different configurations. Analyze the axial friction between the rotor and thrust interface of the inner ring of Auxiliary Bearing System (ABS). Besides, the numerical model is verified by the drop experiment with the axial magnetic force. Moreover, this paper analyzes the influence of the rotor’s drop rotational frequency and the axial bracing features including stiffness and damping on the dynamic behavior during vertical arranged rotor’s drop process. Moreover, the paper provides the optimal axial stiffness and damping for the ABS satisfying the experimental conditions so as to reduce the contact force. Such results provide important references to the design of the ABS with a vertical arranged rotor and its application in HTR-10 and High Temperature Reactor-Pebblebed Modules (HTR-PM).

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