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This work demonstrates the dependence between magnetic properties and the thickness of NiFe thin films. More importantly, a quantitative study of the surface composition of NiFe thin film exposed to atmospheric conditions has been carried out employing angle-resolved X-ray photoelectron spectroscopy (ARXPS). In this study, we fabricated Ni81Fe19 (NiFe) thin films on Si (100) substrate using electron beam evaporation and investigated their surface morphologies, magnetic properties, and the thickness of the surface oxide layer. The coexistence of metallic and oxidized species on the surface are suggested by the depth profile of ARXPS spectra. The thickness of the oxidized species, including NiO, Ni(OH)2, Fe2O3, and Fe3O4, are also estimated based on the ARXPS results. This work provides an effective approach to clarify the surface composition, as well as the thickness of the oxide layer of the thin films.

In certain applications, such as on-chip integrated inductors, ferrite materials are highly desirable owing to their superior magnetic and insulation properties. Spin-spray deposition is a promising method for producing high-quality thin films of ferrite, as it does not require a vacuum and can operate at low temperatures. A comprehensive analysis was conducted to investigate the influence of the substrate on the microstructure and magnetic properties of the thin films, and the growth mechanism of this phenomenon was discussed. In addition, first-order reversal curve measurements were used to study the coercivity and grain size distribution. The results indicate that thermal conductivity played a significant role in determining the thin-film growth during spin spray deposition. Polyimide is considered a more suitable substrate under this process due to its appropriate thermal conductivity, which results in more uniform grain distribution and improved magnetic properties, with maximum permeability and a cutoff frequency reaching 55 and 485 MHz, respectively. Our results provide valuable insights into the mechanism of spin-spray deposition and offer an effective way to tune the performance of ferrite thin-film materials.

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