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SUMMARYThis paper reports the design and development of a set of micromachined Coriolis-force-based mass flowmeters for direct mass flow and fluid density measurements. Based on our current prototypes, the flowmeters developed in ISSYS have high resonance frequencies (above 16 KHz) with a high Q-factor of 1000. The flowmeters are able to offer an outstanding mass flow resolution of 2J..lg/S (0.06 seem for volumetric airflow), and an excellent fluid density resolution of 2.0mg/cc.

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Illis paper reports the development of a family of ultrasensitive and ultra-high-vacuum absolute capacitive pressure sensors, fabricated using the dissolved wafer process technology (DWP).One type of the sensors offers the following characteristics: full range 0-0.5 Torr, sub-pTorr resolution, 'five orders of magnitude pressure response, high stability, and the highest aspect ratio of diaphragm area to its thickness of any MEMS capacitive sensors ever reported worldwide. This novel pressure sensor is pushing the edge of the technology and is capable of operating within the pressure ranges previously monitored only by the "Cold Cathode" and "Hot Filament Ion" techniques.