In this paper, we designed an electrostatic driving MEMS torsional micromirror. The operation principle of the torsional micromirror is analyzed. Based on the analysis, a set of optimized design parameters of the micromirror is suggested. The design optimization of the micromirror is also performed with MathCAD software. At last an ANSYS simulation is achieved in the paper, which proves that the micromirror can provide a maximum workable torsional angle rotation of ±0.55º with corresponding driving voltage of 17.5V.

R temperature measurement in electrical equipment is more and more used in temperature measurement, but accuracy of temperature measurement is susceptible to outside interference. The main factors affecting the accuracy of measuring temperature, such as environmental factors, equipment emissivity and distance coefficient, are analyzed, the solution has been put forward. In the environmental conditions under the condition of relatively unchanged ,change rule of the temperature value along with the temperature measuring distance changing from 0.7 to 5 meters is found, and temperature value is calibrated . The result after calibrating shows that the method is valid,and error of temperature is less than 0.7°C within 5 meters.