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In this Letter, we propose a novel type of spectroscopic ellipsometer, named spatially phase-retarded spectroscopic ellipsometry (SPARSE), based on the spatial polarization distribution opposed to the temporal polarization changes. SPARSE can collect all information necessary to characterize film structures with a single image acquisition, and it has the benefit of real-time measurements. For the verification, feasible experiments with single film-layered certificated reference materials and multi-layered film specimens were carried out.

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We propose a very simple and effective technique to eliminate the direction ambiguity and the dead zone, which limit the measurable range in spectrally resolved interferometry (SRI). By using a dispersive material, the nonlinear spectral phase caused by the dispersion can provide useful information and determine the direction of measuring distances. In addition, the dead zone is removed by two complementary measurement results in dichroic SRI. As the results of feasibility experiments, it was confirmed that the nonlinearity of the spectral phase successfully determined the direction of the measuring distances. Moreover, the final linear distances in the whole measurement range without the dead zone was obtained in dichroic SRI with two LEDs.