A simple method is proposed for growing vertically aligned carbon nanotubes on metal foil using the triode direct current plasma-enhanced chemical vapor deposition (PECVD). The carbon nanotube (CNT) electron emitter was fabricated using fewer process steps with an acid treated metal substrate. The CNT emitter was used for X-ray generation, and the X-ray image of mouse's joint was obtained with an anode current of 0.5 mA at an anode bias of 60 kV. The simple fabrication of a well-aligned CNT with a protection layer on metal foil, and its X-ray application, were studied.
We introduced the metal bonded silicon substrate as Al cathode for reduced contact resistance. The Si-Al was bonded in vacuum system with temperature of 570 o C and 15 min annealing time. After eutectic bonding, the resistance is reduced to a couple of ohms. The resistance was reduce to one hundreds of initial value. The electron emission current increased after Si-Al bonding. And the stability of emission current of the eutectic bonded CNT emitter shows improved.
We developed a carbon nanotube field emission x-ray system for computed tomography imaging. The obtained x-ray images were reconstructed to tomography image using back projection and filtered back projection algorithm. The resulting reconstructed x-ray image clearly shows micrometer scale.
Field emission display (FED) was fabricated with resistassisted patterning (RAP) process grown carbon nanotube (CNT) emitters. Electron emission current uniformity was strongly improved by homogenizing process with silicon-on glass (SOG). The length of CNT emitters was homogenized with SOG coating and selective CNT etching process. Uniform CNT emitters were fabricated with the postgrowth homogenizing process. We fabricated 3 inch FED display with 32 m sub-pixel size with the CNT emitters.Electron emission current shows possible operation of the FED with 5 V/m gate field. The electron emission characteristics and display performance were discussed.
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