We report a simple sol–gel method for the preparation of multilayered hybrid thin films composed of nanostructured SrTiO3 (STO) and BaTiO3 (BTO) layers. A nanoporous thin film of STO is prepared by the spin-coating method on Si/SiO2/Ti/Pt substrate. When the BTO is processed, the BTO is crystallized between STO crystal pores. A significant strain field is induced on the interface between the STO and BTO surfaces. The concave shape of the nanopores could enable the realization of a highly strained interfacial heterostructure composed of STO/BTO. Compared to nanostructured STO, BTO, and bilayer STO/BTO films, multilayered STO/BTO films show the highest dielectric constant and a high Curie temperature (T c) at around 280 °C, which is suitable for electric capacitor applications.

Effects of polarity and pyroelectricity of LiNbO 3 (LN) on electrical properties of ZnO film were investigated. The ZnO films were annealed at 500 °C and 900 °C under an oxygen atmosphere to reduce the interface defects. Current-voltage (I-V ) and surface potential measurements showed that the as deposited ZnO did not show polarity dependence. The ZnO annealed at 500 °C on +LN and −LN showed semiconducting and metallic behaviors at low temperature, respectively. X-ray photoelectron spectroscopy revealed that the polarization of LN changed the band alignment of ZnO/LN interface. In addition, the pyroelectricity increased the band bending, resulting in the enhancement of semiconducting and metallic properties for +LN and −LN, respectively. Especially, the resistivity of ZnO annealed at 500 °C changed by 5-digit from 80 to 500 K. The pyroelectricity and polarity of LN should contribute to modulating the electrical properties of ZnO for environment sensing devices.