Metalenses have recently attracted increased attention due to their remarkable characteristics. The fabrication technology of metalenses has also become an important research direction. In this study, we propose a metalens structure based on Au–MgF2–Au in infrared waveband. The preparation process of the metalens included magnetron sputtering, electron beam evaporation, and electron beam exposure. A dose test was performed during the exposure process, adjusting the exposure dose to minimize the proximity effect after exposure. Then, SEM was used to measure the processed metalens structure, and FDTD software was used to build a model based on the metalens, simulating and analyzing its focusing characteristics. The results show that the size deviation produced during the processing has little effect on the functionality of the metalens. The processed metalens can also focus different polarized light incidences at different spatial positions: The metalens can focus at 4.97 μm for x-polarized light and focus at 13.5 μm for y-polarized light. Additionally, the metalens has good focusing effects with different working wavelengths. We believe that the processing method of metalens proposed in this paper provides guidance for the preparation of subwavelength metasurface structures, and our findings are beneficial in developing new methods of near-infrared regime manipulation.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
customersupport@researchsolutions.com
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.