The acceleration sensor with high g value is widely used in a variety of fields, including collision impact, aerospace, and defense security and thus is a key focus in the future. The sensor with a double-ended four-beam structure is investigated in this paper via finite element simulation analysis. The measurement sensitivity of the sensor can be improved by changing the position of the cantilever beam. Furthermore, transverse interference in the X-direction and Y-direction can be eliminated in theory through the layout of piezoresistors and the Wheatstone circuit. The simulation results show that the sensor's sensitivity is 2.6μV/g while its cross-sensitivity in the X-direction and Y-direction is 0%, indicating that the sensor's performance has been substantially improved.

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To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compression measurement mechanism and designing the sensor’s sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 µV/g in the X direction and 1.42 µV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively.

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