Miniaturization, low cost and high performance of accelerometers have been the topic of extensive research. A kind of convective micromachined accelerometer without proof mass is described in this paper. It consists of a microheater and two temperature sensors which measure the temperature difference between two sides of the microheater caused by the effect of acceleration on free convection. The optimization consideration is conducted before fabrication; some key factors, heater size and power, cavity size, distance between the heater and the sensor and the working medium, are considered. The test for the optimized device shows that the linearity error is smaller than 0.35% under tilt conditions of natural gravity and smaller than 2% under acceleration to 10 g (g = 9.81 m s −2). A sensitivity of 600 µV g −1 is measured for operating power of 87 mW, the response frequency is about 75 Hz and the corresponding noise equivalent acceleration is approximately 1 mg Hz −1/2 at 25 Hz. The dependence of the sensitivity on the heating power is a nearly linear function and the resolution increases with heating power increasing.
Our living environment and the battlefield witness an increase in electromagnetic energy density due to the emergence of electronic electrical equipment, such as automobiles, communication devices, computers. To adapt to the environment and improve the electromagnetic compatibility of equipment, conductive rubber is increasingly being used in electrical equipment. However, due to the lack of simulation parameters and incomplete simulation methods, the current electromagnetic simulation of conductive rubber cannot meet the needs of supporting engineering applications. This paper presents the test results for the electromagnetic characteristics of a conductive rubber material, develops a simulation model of the material based on test data, and verifies the model through experiments in the real working environment. Results show that the simulation model is valid.
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