A microelectromechanical systems acceleration latching switch with cylindrical contacts and an easy-latching/difficult-releasing (ELDR) latching mechanism is presented in this paper. The cylindrical contacts can make the switch immune to fabrication imperfections and off-axis shocks and can decrease the contact resistance as well. The ELDR latching mechanism can latch the switch reliably. Moreover, all the contacts and their support beams are separated from the proof mass so as to prevent the contacts from opening due to the impact resulting from the rebound or vibration of the proof mass once the switch is latched. The switch has been fabricated by a two-mask silicon-on-glass process and tested. The measured latching shock is over 4600 g and the response time is less than 0.2 ms. The total on-resistance is less than 3 while the insulation resistance is more than 100 G and the maximum allowable current is up to 130 mA.

A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized to further reduce the coupling. Moreover, the Coriolis acceleration-induced out-of-plane rotation of the sensing mode is detected by using bending springs and differential comb fingers. This z-sensing design has relatively high Q, so this gyroscope can work at atmospheric pressure. This TFG design has been fabricated and tested. Measured in air, the device demonstrates a sensitivity of 2.9 mV/ • /s, a full range of 800 • s −1 with a 0.9% nonlinearity and the noise floor of 0.035 • /s/Hz 1/2 . This TFG design also has very low coupling, where the measured drive-to-sense coupling and sense-to-drive coupling are −45 dB and −51 dB, respectively.

Our living environment and the battlefield witness an increase in electromagnetic energy density due to the emergence of electronic electrical equipment, such as automobiles, communication devices, computers. To adapt to the environment and improve the electromagnetic compatibility of equipment, conductive rubber is increasingly being used in electrical equipment. However, due to the lack of simulation parameters and incomplete simulation methods, the current electromagnetic simulation of conductive rubber cannot meet the needs of supporting engineering applications. This paper presents the test results for the electromagnetic characteristics of a conductive rubber material, develops a simulation model of the material based on test data, and verifies the model through experiments in the real working environment. Results show that the simulation model is valid.