A lateral-axis micromachined tuning fork gyroscope with torsional<i>Z</i>-sensing and electrostatic force-balanced driving

Guo, Ziwei; Yang, Zhen; Zhao, Qian; Lin, L. T.; Ding, Haitao; Liu, X S; Cui, Jian; Xie, Huikai; Yan, Guizhen

doi:10.1088/0960-1317/20/2/025007

Cited by 20 publications

(17 citation statements)

References 23 publications

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“…Therefore, in-phase mode motion has to be designed as far as possible w.r.t. anti-phase mode such that the coupling effects can be minimized [7]. Moreover, in order to maximize the rate sensitivity of DTFG, the natural frequencies of sense modes and drive mode have to be designed to identical (i.e., frequency match).…”

Section: B Modal Analysis Smentioning

confidence: 99%

Design, fabrication and performance characterizations of an integrated dual-axis tuning fork gyroscope

et al. 2012

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This paper deals with the design, fabrication and preliminary experimental characterizations of a novel integrated dual-axis tuning fork gyroscope (DTFG). The DTFG is fabricated by high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Furthermore, a CMOS drive/readout ASIC chip, which is fabricated by a 0.25 µm 1P5M standard CMOS process, is integrated with the fabricated DTFG by directly wire-bonding. The experimental results of DTFG demonstrate that the rate sensitivities of Z-axis and X-axis sense modes are 1.47 mV/DPS and 0.18 mV/DPS respectively and the associated R2-linearity are 0.9995 and 0.9996. The noise-floors are 0.030 DPS/ Hz 1/2 and 0.247 DPS/Hz 1/2 for Z-axis and X-axis sense modes respectively.

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Section: B Modal Analysis Smentioning

confidence: 99%

Design, fabrication and performance characterizations of an integrated dual-axis tuning fork gyroscope

et al. 2012

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“…It was compatible with the z -axis gyroscope fabrication process. In 2010, Guo et al from Peking University designed a lateral-axis silicon micromachined tuning fork gyroscope [ 5 ]. The proposed gyroscope has lateral drive and torsional z -sensing.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Xia

Kong

Gao

2015

Sensors

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We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes’ angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs’ dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

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“…To realize a lateral single axis gyroscope, an x -axis gyroscope with vertical drive and in-plane sensing was first proposed in 2005 [ 5 ]. Similarly, in 2010, a lateral-axis silicon micromachined tuning fork gyroscope was successfully designed [ 6 ]. The proposed gyroscope has lateral drive and torsional z -sensing with a decoupling function.…”

Section: Introductionmentioning

confidence: 99%

A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure

Xia

Kong

Gao

2015

Sensors

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To avoid the oscillation of four unequal masses seen in previous triaxial linear gyroscopes, a modified silicon triaxial gyroscope with a rotary wheel is presented in this paper. To maintain a large sensitivity and suppress the coupling of different modes, this novel gyroscope structure is designed be perfectly symmetrical with a relatively large size of about 9.8 mm × 9.8 mm. It is available for differentially detecting three-axis angular rates simultaneously. To overcome the coupling between drive and sense modes, numerous necessary frames, beams, and anchors are delicately figured out and properly arranged. Besides, some frequency tuning and feedback mechanisms are addressed in the case of post processing after fabrication. To facilitate mode matched function, a new artificial fish swarm algorithm (AFSA) performed faster than particle swarm optimization (PSO) with a frequency split of 108 Hz. Then, by entrusting the post adjustment of the springs dimensions to the finite element method (FEM) software ANSYS, the final frequency splits can be below 3 Hz. The simulation results demonstrate that the modal frequencies in drive and different sense modes are respectively 8001.1, 8002.6, 8002.8 and 8003.3 Hz. Subsequently, different axis cross coupling effects and scale factors are also analyzed. The simulation results effectively validate the feasibility of the design and relevant theoretical calculation.

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A lateral-axis micromachined tuning fork gyroscope with torsionalZ-sensing and electrostatic force-balanced driving

Cited by 20 publications

References 23 publications

Design, fabrication and performance characterizations of an integrated dual-axis tuning fork gyroscope

Design, fabrication and performance characterizations of an integrated dual-axis tuning fork gyroscope

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure

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