Solid-film electrets and cellular electrets are defined as promising insulating dielectric materials containing permanent electrostatic and polarizations. High-performance charging methods are critical for electret transducers. Unlike dielectric barrier discharge (DBD) charging, the soft X-ray charging method, with its strong penetration ability, has been widely used in electrets after packaging and has even been embedded in high-aspect-ratio structures (HARSs). However, the related charging model and the charging effect of the soft X-ray irradiation remain unclear. In this study, the charge carrier migration theory and the one-dimensional electrostatic model were employed to build the soft X-ray charging models. The influence of soft X-ray irradiation under deferent poling voltages was investigated theoretically and experimentally. The conducted space charge measurement based on a pulsed electro-acoustic (PEA) system with a soft X-ray generator revealed that soft X-ray charging can offer higher surface charge densities and piezoelectricity to cellular electrets under the critical poling voltage lower than twice the breakdown voltage.

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