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One layer SiNx:H films with different thickness are deposited by plasma enhanced chemical vapor deposition to prepare several kinds of polycrystalline silicon color solar cells. The optical and electrical properties are tested by instruments and simulated by PC1D. And the analysis shows that 1) when the antireflection film thickness is less than 50 nm, the deficiencies of color solar cells and solar modules are mainly influenced by open circuit voltage (Voc) and short circuit current (Isc); when the antireflection film thickness is greater than 50 nm, the passivation of H ions is stable and the deficiencies are mainly influenced by Isc; 2) the efficiency of most color solar cells is lower than that of blue ones, but the color solar cell will have some gains after packaging, which is because of the better optical matching of reflective film with ethylene-vinyl acetal copo and glass.

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