This letter presents a novel radio frequency (RF) inductor in a monolithic inductor-capacitor circuit developed by using micro-electromechanical systems (MEMS) fabrication technology. The inductor consists of 40-m-thick single crystalline silicon spiral with copper surface coating as the conductor, which is suspended on a glass substrate. The fabricated inductor exhibits a self-resonance frequency higher than 15 GHz, with the quality factor more than 35 and inductance over 5 nH at 11.3 GHz. Simulations based on a compact equivalent circuit model with parameters extracted using a characteristic-function approach have also been carried out for the inductor, and good agreement with measurements is obtained.Index Terms-Copper coating, micro-electromechanical systems (MEMS), monolithic MEMS inductor-capacitor circuit, parameter extraction and simulation, radio frequency (RF) inductor.

The stability and consistency of harmonic amplitude measurement is very important for power quality analysis and assessment. Some random factors may influence the measurement results in the real world, for example the initial sampling time. In this paper, we put this view a little forward, and prove that the amplitude errors with DFT method change periodically with the initial-sampling time, and DFT method “may” give relatively worse results, with the window which has better characteristics. To mitigate this random influence and to achieve more stable measurement precision, the well known shifting window average DFT, which is based on expectation calculation, is adopted. The effectiveness of this method and its recursive mode has been tested on several simulated signals and measured signals generated by Electrical Power Standards Fluke 6100A.