S-doped ZnO (ZnO:S) film was fabricated by supplying ZnS species from laser ablation of a ZnS target during ZnO growth. Variations of lattice constants and band gaps with respect to S content did not follow Vegard’s law. The ZnO:S film showed semiconducting behavior with lower activation energy and resistivity than those of ZnO owing to higher carrier concentration. Despite the absence of magnetic elements, the large magnetoresistance amount of 26% was observed at 3 K from ZnO:S film.

Combinatorial laser molecular-beam epitaxy method was employed to fabricate epitaxial Zn1−xMnxO thin films in a high throughput fashion. Local structures around Mn were investigated for these c-axis-oriented epitaxial films by fluorescence x-ray absorption fine structure measurements. It was shown that Mn substitutionally replaces Zn in Zn1−xMnxO (x<0.22) films. Well-structured blue and ultraviolet cathodoluminescence peaks corresponding to the intra-d-shell transitions of Mn2+ were observed, especially for smaller x. The luminescence is quenched rapidly as x is increased. By comparing the relative absorption strength per mole Mn2+ with the statistical probability of isolated Mn2+, it was concluded that the quick decrement of isolated Mn2+ with increasing x is responsible for the severe suppression of the blue and ultraviolet luminescence.

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Sulfide was employed as a buffer layer for the growth of SrTiO3 (STO) thin films on Si. In order to utilize a relationship of a 45° rotational lattice match between Si and STO, ZnS, with almost the same lattice constant as Si, was used as the buffer. The buffer layer showed a partially disordered region at the ZnS/Si interface, owing to steady interdiffusion between ZnS and Si. STO film on ZnS buffered Si showed the rotational epitaxy with respect to Si and sharp STO/ZnS interface. Propagation of stacking faults from the ZnS/Si interface was observed, but those plane defects were terminated at the rotational STO/ZnS interface, resulting in high-quality STO films. The dielectric constant of the STO/ZnS film was 34.

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