Hexagonal AlN nanorod and nanoneedle arrays were synthesized through the direct reaction of AlCl(3) and NH(3) by chemical vapor deposition at about 750 °C. Both the AlN nanoneedle and nanorod samples were of wurtzite structure and grew preferentially along the c-axis. With an increase in the ratio of NH(3) to Ar, an evolution from nanorods to nanoneedles was observed. A growth model was proposed to explain the possible growth mechanism. Measurements in field emission show that AlN nanoneedle arrays have a much lower turn-on field (3.1 V µm(-1)) compared to nanorod arrays (15.3 V µm(-1)), due to their large curvature geometry. The AlN nanoneedle arrays have potential applications in many fields, such as electron-emitting nanodevices and field-emission-based flat-panel displays.

Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

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