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Potassium dihydrogen phosphate (KDP) is an important nonlinear optical material. Since the 1930s, this material has attracted significant attention because of its excellent physical and optical properties. [1][2][3][4] KDP has been widely used in many technological fields, such as laser frequency conversion, high-speed Q-switching, optical communication, and optical signal processing. [5][6][7][8][9] At the present, one can easily obtain a large aperture KDP with the rapid growth technology. 10,11 To use a KDP component in high-energy laser systems [12][13][14][15] ; however, it is required to minimize the surface and subsurface damages which are mostly introduced in a mechanical surface finishing process. An ideal outcome is that the manufactured KDP component is totally damage free. However, KDP is one of the most difficult-to-handle materials due to its fragility, unstable microstructure, and complicated mechanical behavior. 16,17 A low-quality surface or subsurface can easily reduce the laser-damage threshold (LDT) and the service life of a KDP component. 18,19 How to overcome the difficulties and improve the machinability of KDP has been challenging.There are many issues in relation to the damage-free manufacture of a KDP component, among which the most critical is its complicated deformation mechanisms under external loading. At stressing, a KDP crystal can undergo

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